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Direct laser writing is widely used to fabricate 3D waveguide devices by modi cation of a materials refractive index. The fabrication delity depends strongly on focal spot quality, which in many cases is impaired by aberrations, particularly spherical aberration caused by refractive index mismatch. We use adaptive optics to correct aberration and maintain fabrication performance at a range of depths. Adaptive multifocus methods are also shown for increasing the fabrication speed for single waveguides. © 2013 Copyright SPIE.

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Journal article


Proceedings of SPIE - The International Society for Optical Engineering

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