Nanofabricated solid immersion lenses registered to single emitters in diamond
Marseglia L., Hadden JP., Stanley-Clarke AC., Harrison JP., Patton B., Ho YLD., Naydenov B., Jelezko F., Meijer J., Dolan PR., Smith JM., Rarity JG., O'brien JL.
We describe a technique for fabricating micro- and nanostructures incorporating fluorescent defects in diamond with a positional accuracy better than hundreds of nanometers. Using confocal fluorescence microscopy and focused ion beam etching, we initially locate a suitable defect with respect to registration marks on the diamond surface then etch a structure using these coordinates. We demonstrate the technique by etching an 8 μm diameter hemisphere positioned with single negatively charged nitrogen-vacancy defect lies at its origin. Direct comparison of the fluorescence photon count rate before and after fabrication shows an eightfold increase due to the presence of the hemisphere. © 2011 American Institute of Physics.